Atomic-scale simulation of ultrasonic vibration-assisted polishing process for graphene/GaN-layered composites
Huan He, Tinghong Gao, Yutao Liu, Qian Chen, Quan Xie, Yongchao Liang, Qingquan Xiao
Topics & Concepts
Materials sciencePolishingComposite materialVibrationUltrasonic sensorAtomic unitsGrapheneChemical-mechanical planarizationAcousticsNanotechnologyPhysicsQuantum mechanicsGraphene research and applicationsSemiconductor materials and devicesAdvanced Surface Polishing Techniques