Influence of the carbon incorporation on the mechanical properties of TiB2 thin films prepared by HiPIMS
N. Sala, M.D. Abad, J.C. Sánchez-López, Ferran Crugeira, A. Ramos-Masana, Carles Colominas
Topics & Concepts
Materials scienceX-ray photoelectron spectroscopyHigh-power impulse magnetron sputteringNanoindentationMicrostructureSputter depositionCarbon fibersScanning electron microscopeThin filmTitaniumChemical engineeringCarbon filmChemical vapor depositionComposite materialSputteringMetallurgyNanotechnologyEngineeringComposite numberMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchBoron and Carbon Nanomaterials Research