Bulk and film synthesis pathways to ternary magnesium tungsten nitrides
Christopher L. Rom, Rebecca W. Smaha, Callan A. Knebel, Karen N. Heinselman, James R. Neilson, Sage R. Bauers, Andriy Zakutayev
Abstract
Thin film sputtering syntheses make new cation disordered Mg–W–N phases. Annealing the films drives cation ordering, which matches the phase produced by bulk synthesis.
Topics & Concepts
Materials scienceTernary operationTungstenAnnealing (glass)MagnesiumNitrideSputteringThin filmChemical engineeringInorganic chemistryMetallurgyNanotechnologyChemistryEngineeringComputer scienceLayer (electronics)Programming languageMetal and Thin Film MechanicsSemiconductor materials and devicesInorganic Chemistry and Materials