Performance analysis and improvement of air filtration and ventilation process in semiconductor clean air-conditioning system
Zhiyao Ma, Bowen Guan, Xiaohua Liu, Tao Zhang
Topics & Concepts
AirflowCleanroomAir conditioningVentilation (architecture)Environmental scienceFiltration (mathematics)EngineeringEnvironmental engineeringRoom air distributionAutomotive engineeringWaste managementMechanical engineeringMaterials scienceMeteorologyMathematicsPhysicsStatisticsNanotechnologyBuilding Energy and Comfort OptimizationInfection Control and VentilationEnergy and Environmental Systems