Influence of surface roughness on the sputter yield of Mo under keV D ion irradiation
Mitja Kelemen, T. Schwarz‐Selinger, A. Mutzke, M. Balden, E. Vassallo, Matteo Pedroni, D. Dellasega, M. Passoni, Francesco Romeo, A. Hakola, Primož Pelicon, Rok Zaplotnik, S. Markelj
Topics & Concepts
SputteringSurface roughnessMaterials scienceYield (engineering)Analytical Chemistry (journal)IonIrradiationSurface finishSputter depositionElectron cyclotron resonanceAtomic physicsThin filmChemistryNanotechnologyComposite materialNuclear physicsPhysicsOrganic chemistryChromatographyIon-surface interactions and analysisMetal and Thin Film MechanicsFusion materials and technologies