Effects of thermal annealing on the structural and electrical properties of ZnO thin films for boosting their piezoelectric response
Quang Chieu Bui, B. Salem, Hervé Roussel, Xavier Mescot, Youssouf Guerfi, Carmen Jiménez, Vincent Consonni, Gustavo Ardila
Topics & Concepts
Materials scienceAnnealing (glass)PiezoelectricityCrystallinityThin filmGrain boundaryChemical vapor depositionElectrical resistivity and conductivityGrain sizeSiliconComposite materialGrain growthNanotechnologyOptoelectronicsMicrostructureElectrical engineeringEngineeringZnO doping and propertiesAcoustic Wave Resonator TechnologiesAdvanced Sensor and Energy Harvesting Materials