Integrated optical critical dimension metrology with Mueller matrix ellipsometry
Chunfu Guo, Yating Shi, Huaxi Wu, Weiqi Li, Chuanwei Zhang, Hao Jiang, Shiyuan Liu
Topics & Concepts
MetrologyAzimuthWaferCritical dimensionEllipsometryDimension (graph theory)Sensitivity (control systems)Matrix (chemical analysis)OpticsNanostructureMaterials scienceRidgeComputer scienceAlgorithmPhysicsMathematicsOptoelectronicsNanotechnologyThin filmElectronic engineeringEngineeringGeologyComposite materialPure mathematicsPaleontologyOptical Coatings and GratingsSurface Roughness and Optical MeasurementsOptical Polarization and Ellipsometry