Assessing environmental impacts of nanoscale semi-conductor manufacturing from the life cycle assessment perspective
Tsai‐Chi Kuo, Chien-Yun Kuo, Liangwei Chen
Topics & Concepts
Life-cycle assessmentSemiconductor industrySustainabilityResource (disambiguation)Environmental impact assessmentResource efficiencyCarbon footprintSemiconductor device fabricationProduction (economics)BusinessEngineeringNanotechnologyWaferManufacturing engineeringGreenhouse gasMaterials scienceComputer scienceBiologyComputer networkEcologyEconomicsMacroeconomicsRecycling and Waste Management TechniquesGreen IT and SustainabilityEnvironmental Impact and Sustainability