Field-enhanced chemical vapor deposition: new perspectives for thin film growth
Bhupendra Singh, Thomas Fischer, Sanjay Mathur
Abstract
Chemical vapor deposition (CVD) is a versatile technique for producing thin films and coatings of functional materials with diverse mechanical, electrochemical, electrical, tribological, and optical properties.
Topics & Concepts
Combustion chemical vapor depositionThin filmChemical vapor depositionMaterials scienceField (mathematics)Deposition (geology)Chemical engineeringNanotechnologyEngineering physicsCarbon filmEngineeringGeologyPaleontologyPure mathematicsSedimentMathematicsSemiconductor materials and devicesElectronic and Structural Properties of Oxidesnanoparticles nucleation surface interactions