Molecular dynamics analysis of the influence of ion implantation parameters on ultra-precision machining of silicon carbide
Weilong Wu, Yang Hu, Xiaosong Meng, Bokai Liao, Houfu Dai
Topics & Concepts
Materials scienceMolecular dynamicsIon implantationMachiningSilicon carbideIonStress (linguistics)DislocationSiliconRange (aeronautics)Composite materialMetallurgyChemistryPhilosophyPhysicsQuantum mechanicsLinguisticsComputational chemistryAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationMetal and Thin Film Mechanics