Comb-mode resolved spectral domain interferometer enabled by a broadband electro-optic frequency comb
Yoon‐Soo Jang, Jungjae Park, Jonghan Jin
Abstract
The spectral domain interferometer (SDI) has been widely used in dimensional metrology. Depending on the nature of the SDI, both wider spectral bandwidth and narrower linewidth of the light source are paradoxically required to achieve better resolution and longer measurable distances. From this perspective, a broadband frequency comb with a repetition rate high enough to be spectrally resolved can be an ideal light source for SDIs. In this paper, we propose and implement a broadband electro-optic frequency comb to realize a comb-mode resolved SDI. The proposed electro-optic frequency comb was designed with an optically recirculating loop to provide a broadband spectrum, which has a repetition rate of 17.5 GHz and a spectral range of 35 nm. In a preliminary test, we demonstrated absolute distance measurements with sub-100 nm repeatability. Because of these advantages, we believe this electro-optic frequency comb can open up new possibilities for SDIs.