Dislocations in 4H-SiC epilayers for power devices: Identification, formation, and regulation
Yifei Li, Peng‐Xiang Hou, Shuangyuan Pan, Pin Wang, Weiwei Cheng, Jing Wang, Le Yu, Zheyang Li, Rui Jin, Rui Jin
Topics & Concepts
Materials scienceIdentification (biology)Power (physics)Silicon carbideOptoelectronicsEngineering physicsPower semiconductor deviceComposite materialThermodynamicsPhysicsBiologyEngineeringBotanySilicon Carbide Semiconductor TechnologiesSemiconductor materials and interfacesSemiconductor materials and devices