Litcius/Paper detail

Membrane-Based Scanning Force Microscopy

David Hälg, Thomas Gisler, Yeghishe Tsaturyan, Letizia Catalini, Urs Grob, Marc-Dominik Krass, Martin Héritier, Hinrich Mattiat, Ann-Katrin Thamm, Romana Schirhagl, Eric C. Langman, Albert Schliesser, Christian L. Degen, Alexander Eichler

2021Physical Review Applied66 citationsDOIOpen Access PDF

Abstract

Mechanical resonators based on silicon nitride membranes offer very high quality factors and outstanding force sensitivity. However, applying such devices as practical sensors has long been impeded by their seemingly incompatible clamping geometry. Using an unconventional setup, the authors realize a membrane-based scanning force microscope and demonstrate nanometer-scale topographic imaging. This instrument is a promising candidate for quantum-limited force detection, and for nuclear spin imaging.

Topics & Concepts

Scanning Force MicroscopyClampingSilicon nitrideMaterials scienceResonatorScanning probe microscopyAtomic force microscopyMicroscopyAtomic force acoustic microscopyNon-contact atomic force microscopyMagnetic force microscopeNanotechnologyMicroscopeOptoelectronicsScanning ion-conductance microscopySiliconOpticsQuality (philosophy)Conductive atomic force microscopyScanning electron microscopeMembraneMicroelectromechanical systemsForce spectroscopyScanning capacitance microscopyForce dynamicsKelvin probe force microscopeForce Microscopy Techniques and ApplicationsMechanical and Optical ResonatorsLipid Membrane Structure and Behavior