Phase control of sputter-grown large-area MoTe2 films by preferential sublimation of Te: amorphous, 1T′ and 2H phases
Shogo Hatayama, Yuta Saito, Kotaro Makino, Noriyuki Uchida, Yi Shuang, Shunsuke Mori, Yuji Sutou, Miloš Krbal, Paul Fons
Abstract
The crystallization mechanism of sputter-deposited amorphous Mo–Te film is revealed enabling the large-area growth of 2D materials.
Topics & Concepts
Materials scienceSublimation (psychology)Amorphous solidSputteringCrystallizationChemical engineeringSputter depositionCrystallographyThin filmNanotechnologyChemistryEngineeringPsychologyPsychotherapist2D Materials and ApplicationsPhase-change materials and chalcogenidesAdvanced Memory and Neural Computing