Deep reinforcement learning optimized double exponentially weighted moving average controller for chemical mechanical polishing processes
Zhu Ma, Tianhong Pan, Jiaqiang Tian
Topics & Concepts
Reinforcement learningController (irrigation)Control theory (sociology)Markov decision processCompensation (psychology)PolishingComputer scienceProcess (computing)Tracking (education)Control engineeringMarkov processEngineeringArtificial intelligenceMathematicsControl (management)StatisticsMechanical engineeringPsychologyPsychoanalysisAgronomyOperating systemPedagogyBiologyIterative Learning Control SystemsAdvanced Control Systems OptimizationScheduling and Optimization Algorithms