Synergistically enhanced Si3N4/Cu heterostructure bonding by laser surface modification
Yanyu Song, Haitao Zhu, Duo Liu, Xiaoguo Song, Hong Bian, Wei Fu, Danyang Lin, Caiwang Tan, Jian Cao, Jian Cao
Topics & Concepts
Materials scienceSurface modificationCeramicLaserHeterojunctionDiffusion bondingLaser power scalingFabricationComposite materialOptoelectronicsChemical engineeringOpticsAlternative medicineMedicineEngineeringPathologyPhysics3D IC and TSV technologiesAdvanced ceramic materials synthesisAdditive Manufacturing and 3D Printing Technologies