Effect of pulsed electric field on the nanocrystalline growth of magnetron-sputtered TiAlN hard coatings
Wenzhang Lü, Guojian Li, Xianliang Li, Shiying Liu, Jiwu Deng, Qiang Wang
Topics & Concepts
Materials scienceNanocrystalline materialElectric fieldJoule heatingNucleationPulsed DCSputter depositionCoatingElectric heatingCavity magnetronDiffusionNanocrystalComposite materialOptoelectronicsSputteringNanotechnologyThin filmThermodynamicsQuantum mechanicsPhysicsMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchHigh-Temperature Coating Behaviors