Molecular beam epitaxy growth and characterization of AlGaN epilayers in nitrogen-rich condition on Si substrate
Qihua Zhang, Xue Yin, Eli Martel, Songrui Zhao
Topics & Concepts
Materials scienceMolecular beam epitaxyNitrideSubstrate (aquarium)Layer (electronics)OptoelectronicsEpitaxyEtching (microfabrication)Gallium nitrideNanotechnologyGeologyOceanographyGaN-based semiconductor devices and materialsSemiconductor Quantum Structures and DevicesGa2O3 and related materials