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Characterization of physical and mechanical properties of Al2O3-doped ZnO (AZO) thin films deposited on transparent polyimide supports with various ALD process parameters

Gyeong-Beom Lee, Seung Hak Song, Myeong-Woo Lee, Yun-Jae Kim, Byoung‐Ho Choi

2020Applied Surface Science35 citationsDOI

Topics & Concepts

Materials sciencePolyimideAtomic layer depositionThin filmComposite materialDopingUltimate tensile strengthFabricationSheet resistanceLayer (electronics)NanotechnologyOptoelectronicsPathologyAlternative medicineMedicineZnO doping and propertiesSemiconductor materials and devicesThin-Film Transistor Technologies
Characterization of physical and mechanical properties of Al2O3-doped ZnO (AZO) thin films deposited on transparent polyimide supports with various ALD process parameters | Litcius