Effect of annealing temperature on β-Ga2O3 thin films deposited by RF sputtering method
Amit Kumar Singh, Mukul Gupta, Vasant Sathe, Y. S. Katharria
Topics & Concepts
Materials scienceThin filmAnnealing (glass)Band gapMonoclinic crystal systemRaman spectroscopyCrystalliteAnalytical Chemistry (journal)Sputter depositionFused quartzDiffractionSputteringQuartzOptoelectronicsOpticsCrystal structureCrystallographyNanotechnologyComposite materialChemistryMetallurgyPhysicsChromatographyGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques