High-precision servo control design and optimization for dicing semiconductor wafer
Fengjun Chen, Jianhang Huang, Jialiang Xu
Topics & Concepts
Wafer dicingWaferMaterials scienceServo controlSemiconductorServoRepetitive controlControl theory (sociology)Electronic engineeringControl systemComputer scienceOptoelectronicsMechanical engineeringEngineeringElectrical engineeringControl (management)Artificial intelligenceAdvanced Surface Polishing TechniquesAdvanced Measurement and Metrology TechniquesOptical Systems and Laser Technology