Effects of polishing parameters on surface quality in sapphire double-sided CMP
Zhongyang Li, Zhaohui Deng, Yangxuan Hu
Topics & Concepts
PolishingMaterials scienceWaferSapphireSurface roughnessGrindingChemical-mechanical planarizationSurface finishComposite materialRotational speedOpticsOptoelectronicsMechanical engineeringPhysicsLaserEngineeringAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationDiamond and Carbon-based Materials Research