CVD of MoS<sub>2</sub> single layer flakes using Na<sub>2</sub>MoO<sub>4</sub> – impact of oxygen and temperature–time-profile
Romana Alice Kalt, Andrea Arcifa, Christian Wäckerlin, Andreas Stemmer
Abstract
In-depth investigation of MoS 2 flakes synthesized by CVD to derive insights on growth, process parameters, and detachability enabled by water.
Topics & Concepts
Materials scienceLayer (electronics)OxygenChemical vapor depositionProcess (computing)Chemical engineeringNanotechnologyOptoelectronicsChemistryComputer scienceOperating systemEngineeringOrganic chemistry2D Materials and ApplicationsMXene and MAX Phase MaterialsMetal and Thin Film Mechanics