Influence of surface morphology and processing parameters on polishing of silicon carbide ceramics using femtosecond laser pulses
Qingzhen Zheng, Xuesong Mei, Gedong Jiang, Zhaoxuan Yan, Zhengjie Fan, Wenjun Wang, Aifei Pan, Jianlei Cui
Topics & Concepts
Materials sciencePolishingSilicon carbideLaserCeramicFemtosecondOpticsSiliconLaser ablationComposite materialOptoelectronicsPhysicsLaser Material Processing TechniquesAdvanced Surface Polishing TechniquesLaser-induced spectroscopy and plasma