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Profile prediction for ultrasonic vibration polishing of alumina ceramics

Fanwei Meng, Tianbiao Yu, Marian Wiercigroch, Zhao Wang, Zhijie Cui, Yingdong Liang, Zixuan Wang, Ji Zhao

2023International Journal of Mechanical Sciences40 citationsDOIOpen Access PDF

Abstract

Ultrasonic-assisted polishing methods are widely used for the precision processing of hard and brittle materials such as glass and ceramics due to their excellent polishing performance. Most research has been focused on basic removal mechanisms of ultrasonic-assisted polished materials. Some investigators have studied the profile of surfaces after conventional mechanical polishing, but less research has been done on the profile of faces after axial ultrasonically assisted polishing. This paper has established a novel force prediction model for the ultrasonically assisted polishing, which is critical for geometrical accuracy and surface finish. Also a material removal model has been developed for this process using a spherical polishing head at different tilt angles. Pressure and velocity distributions have been calculated for multi-position contact areas. The experimental study of multiple trajectory polishing of alumina ceramics showed a good correlation between the experimental and simulated surface profiles. The ultrasonic polishing process parameters were optimized by applying the gray correlation analysis. The obtained results can be used not only select ultrasonic assisted polishing process parameters but also provide theoretical underpinning for surface polishing trajectory planning.

Topics & Concepts

PolishingMaterials scienceUltrasonic sensorCeramicSurface roughnessBrittlenessChemical-mechanical planarizationSurface finishComposite materialVibrationEngineering drawingAcousticsEngineeringPhysicsAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationTunneling and Rock Mechanics
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