A complete phase distribution map of the laser affected zone and ablation debris formed by nanosecond laser-cutting of SiC
M. Djafari Rouhani, Sai Bhavani Sravan Metla, Jonathan Hobley, Dileep Karnam, Chia‐Hung Hung, Yu‐Lung Lo, Yeau‐Ren Jeng
Topics & Concepts
Materials scienceDebrisAblationLaser ablationLaserPhase (matter)NanosecondOpticsComposite materialGeologyEngineeringChemistryAerospace engineeringPhysicsOceanographyOrganic chemistryDiamond and Carbon-based Materials ResearchAdvanced Surface Polishing TechniquesIntegrated Circuits and Semiconductor Failure Analysis