RF magnetron sputtered AlCoCrCu0.5FeNi high entropy alloy (HEA) thin films with tuned microstructure and chemical composition
N. A. Khan, Behnam Akhavan, Cuifeng Zhou, Haoruo Zhou, Li Chang, Yu U. Wang, Yanping Liu, Li Fu, Marcela Bilek, Zongwen Liu
Topics & Concepts
MicrostructureMaterials scienceX-ray photoelectron spectroscopyNanoindentationThin filmSputter depositionAmorphous solidAlloyAnalytical Chemistry (journal)Scanning electron microscopeSputteringTransmission electron microscopyGrain sizeMetallurgyComposite materialChemical engineeringCrystallographyNanotechnologyChemistryEngineeringChromatographyHigh Entropy Alloys StudiesHigh-Temperature Coating BehaviorsMetal and Thin Film Mechanics