A flexible phase error compensation method based on probability distribution functions in phase measuring profilometry
Yuankun Liu, Yu Xin, Junpeng Xue, Qican Zhang, Xianyu Su
Topics & Concepts
ProfilometerCompensation (psychology)Phase (matter)Computer scienceSmoothingProbability distributionAlgorithmNonlinear systemProbability of errorOpticsComputer visionMathematicsMaterials scienceStatisticsPhysicsSurface roughnessPsychoanalysisComposite materialQuantum mechanicsPsychologyOptical measurement and interference techniquesImage Processing Techniques and ApplicationsAdvanced Measurement and Detection Methods