The influence of pulse duration and duty cycle on the energy flux to the substrate in high power impulse magnetron sputtering
В.О. Оскирко, А. Н. Захаров, A.S. Grenadyorov, А.П. Павлов, V. A. Semenov, С. В. Работкин, V. Yu. Kozhevnikov, А.А. Solovyev
Topics & Concepts
High-power impulse magnetron sputteringDuty cyclePulse durationMaterials scienceSputteringImpulse (physics)Pulse (music)Sputter depositionVoltageOpticsElectrical engineeringPhysicsLaserThin filmNanotechnologyEngineeringQuantum mechanicsMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchAdvanced Sensor Technologies Research