Improving the microstructure and properties of PZT thin films via annealing prepared by RF magnetron sputtering using Pb(Zr0.52Ti0.48)O3 target
Pakinee Thongrit, Chanunthorn Chananonnawathorn, Mati Horprathum, Narit Triamnak, Tossaporn Lertvanithphol, Sukum Eitssayeam, Kamonpan Pengpat, Patamas Bintachitt
Topics & Concepts
Materials scienceAnnealing (glass)Thin filmMicrostructureCrystallinitySputter depositionGrain sizeSputteringComposite materialSurface roughnessCeramicAnalytical Chemistry (journal)NanotechnologyChemistryChromatographyFerroelectric and Piezoelectric MaterialsAcoustic Wave Resonator TechnologiesMicrowave Dielectric Ceramics Synthesis