Periodic transparent nanowires in ITO film fabricated via femtosecond laser direct writing
Qilin Jiang, Long Chen, Jukun Liu, Yuchan Zhang, Shian Zhang, Donghai Feng, Tianqing Jia, Peng Zhou, Qian Wang, Zhenrong Sun, Hongxing Xu
Abstract
This paper reports the fabrication of regular large-area laser-induced periodic surface structures (LIPSSs) in indium tin oxide (ITO) films via femtosecond laser direct writing focused by a cylindrical lens. The regular LIPSSs exhibited good properties as nanowires, with a resistivity almost equal to that of the initial ITO film. By changing the laser fluence, the nanowire resistances could be tuned from 15 to 73 kΩ/mm with a consistency of ±10%. Furthermore, the average transmittance of the ITO films with regular LIPSSs in the range of 1200–2000 nm was improved from 21% to 60%. The regular LIPSS is promising for transparent electrodes of nano-optoelectronic devices—particularly in the near-infrared band.