Mechanical properties of crystalline and amorphous aluminum oxide thin films grown by atomic layer deposition
Lauri Aarik, Hugo Mändar, Aivar Tarre, Helle‐Mai Piirsoo, Jaan Aarik
Topics & Concepts
CrystallinityAmorphous solidMaterials scienceAnnealing (glass)Thin filmAtomic layer depositionAluminiumAluminium oxideNanoindentationComposite materialIndentation hardnessLayer (electronics)MineralogyChemical engineeringCrystallographyNanotechnologyMicrostructureChemistryEngineeringSemiconductor materials and devicesMetal and Thin Film MechanicsSemiconductor materials and interfaces