High power impulse magnetron sputtering growth processes for copper nitride thin film and its highly enhanced UV - visible photodetection properties
Shikha Sakalley, Adhimoorthy Saravanan, Wei-Chun Cheng, Sheng‐Chi Chen, Hui Sun, Cheng‐Liang Hsu, Bohr‐Ran Huang
Topics & Concepts
Materials scienceHigh-power impulse magnetron sputteringThin filmPhotodetectionOptoelectronicsSputter depositionSputteringCrystalliteNitrideUltravioletNanotechnologyPhotodetectorLayer (electronics)MetallurgyZnO doping and propertiesCopper-based nanomaterials and applicationsGa2O3 and related materials