Improved performance of InGaAs/AlGaAs quantum well lasers on silicon using InAlAs trapping layers
Zhuoliang Liu, Hao Liu, Chen Jiang, Bojie Ma, Jun Wang, Rui Ming, Shuaicheng Liu, Qing Ge, Ren Ren, Jiacheng Lin, Hao Zhai, Feng Lin, Qi Wang, Kai Liu, Yongqing Huang, Xiaomin Ren
Abstract
InGaAs/AlGaAs multiple quantum well lasers grown on silicon (001) by molecular beam epitaxy have been demonstrated. By inserting InAlAs trapping layers into AlGaAs cladding layers, misfit dislocations easily located in the active region can be effectively transferred out of the active region. For comparison, the same laser structure without the InAlAs trapping layers was also grown. All these as-grown materials were fabricated into Fabry-Perot lasers with the same cavity size of 20 × 1000 µm 2 . The laser with trapping layers achieved a 2.7-fold reduction in threshold current density under pulsed operation (5 µs-pulsed width, 1%-duty cycle) compared to the counterpart, and further realized a room-temperature continuous-wave lasing with a threshold current of 537 mA which corresponds to a threshold current density of 2.7 kA/cm 2 . When the injection current reached 1000 mA, the single-facet maximum output power and slope efficiency were 45.3 mW and 0.143 W/A, respectively. This work demonstrates significantly improved performances of InGaAs/AlGaAs quantum well lasers monolithically grown on silicon, providing a feasible solution to optimize the InGaAs quantum well structure.