On the grain size-thickness correlation for thin films
A. Дулмаа, Florian Cougnon, Robin Dedoncker, Diederik Depla
Topics & Concepts
Materials scienceGrain sizeThin filmComposite materialGrain boundary strengtheningGrain boundaryMicrostructureNanotechnologyCopper Interconnects and ReliabilityMetal and Thin Film MechanicsSurface and Thin Film Phenomena