2.45-μm 1280 × 1024 InGaAs Focal Plane Array With 15-μm Pitch for Extended SWIR Imaging
Jifeng Cheng, X. Li, Xiumei Shao, T. Li, Y. J., Yi Gu, Siqi Deng, Yonggang Zhang, Haimei Gong
Abstract
A <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$15~\mu \text{m}$ </tex-math></inline-formula> pitch extended wavelength In <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">0.83</sub> Ga <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">0.17</sub> As/ InP mega-pixel focal plane array (FPA) with a format of 1280 <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\times 1024$ </tex-math></inline-formula> and a spectral response range of 1150–2450 nm has been demonstrated for the first time. High fill factor up to >86%, low dark current densities down to < 133 nA/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> , high quantum efficiencies up to >69%, were achieved by implementing novel high density micro-mesa array processing technologies. A proprietary wafer bowing control technique was developed, attaining a high pixel operability of 99.37%. Laboratory imaging was also demonstrated, showing potentiality for high resolution imaging applications in a wider SWIR spectrum range.