Determination of the degree of ionization of vapors of conducting and dielectric materials during electron-beam evaporation in the forevacuum range of pressure
A.V. Tyunkov, A. A. Andronov, Е. М. Oks, Yu. G. Yushkov, Denis B. Zolotukhin
Topics & Concepts
IonizationEvaporationCondensationCathode rayRange (aeronautics)Electron beam physical vapor depositionVapor pressureDegree (music)Atomic physicsBeam (structure)Materials scienceElectronDielectricChemistryAnalytical Chemistry (journal)Chemical vapor depositionOptoelectronicsOpticsIonPhysicsComposite materialThermodynamicsNuclear physicsOrganic chemistryChromatographyAcousticsMetal and Thin Film MechanicsPlasma Diagnostics and ApplicationsIon-surface interactions and analysis