Pre-annealing for improved LPCVD deposited boron-doped poly-Si hole-selective contacts
Josua Stückelberger, Di Yan, Sieu Pheng Phang, Chris Samundsett, Jiali Wang, Luca Antognini, Franz‐Josef Haug, Zhao Wang, Jie Yang, Peiting Zheng, Xinyu Zhang, Daniel Macdonald
Topics & Concepts
PassivationAnnealing (glass)CrystallinityRaman spectroscopyMaterials scienceDopingBoronAnalytical Chemistry (journal)SiliconChemistryOptoelectronicsNanotechnologyMetallurgyComposite materialOpticsLayer (electronics)ChromatographyPhysicsOrganic chemistrySilicon and Solar Cell TechnologiesIntegrated Circuits and Semiconductor Failure AnalysisSemiconductor materials and interfaces