Effect of Interaction between Polishing Powder Particles and a Treated Material on the Polishing Characteristics of Optical Surfaces
Yu. D. Filatov, V. I. Sidorko, С. В. Ковалев, V. A. Kovalev
Abstract
When studying the regularities inherent in the effect of intermolecular interaction between polishing powder particles and a treated material on the material removal rate in the process of polishing and the roughness of the polished surfaces of optical parts and elements, which are manufactured of glass, sitalls, and optical and semiconductor crystals, it has been established that the material removal rate linearly decreases with an increase in the Lifshitz constant and the potential of molecular interaction between a disperse phase particle and a treated surface. It has been shown that the material removal rate in the course of polishing and the roughness parameters of treated surfaces decrease with an increase in the transfer energy. It has been established that the ratio η/Ra linearly grows with a decrease in the Lifshitz constant. It has been demonstrated that the required level of material removal rate and roughness can be attained for treated surfaces by using a disperse polishing system of micro- and nanopowders.