A novel design of a MEMS resonant accelerometer with adjustable sensitivity
Yiqiu Zhang, Shiqiu Wang, Qiqi Yang, Yonghong Qi, Minghui Zhao, Xueyong Wei
Topics & Concepts
AccelerometerMicroelectromechanical systemsSensitivity (control systems)Electronic engineeringMaterials scienceEngineeringAcousticsComputer scienceOptoelectronicsPhysicsOperating systemAdvanced MEMS and NEMS TechnologiesGeophysics and Sensor TechnologyMechanical and Optical Resonators