Understanding the effect of sputtering pressures on the thermoelectric properties of GeTe films
Noppanut Daichakomphu, Suman Abbas, Ta‐Lei Chou, Li–Chyong Chen, Kuei‐Hsien Chen, Aparporn Sakulkalavek, Rachsak Sakdanuphab
Topics & Concepts
SputteringMaterials scienceThermoelectric effectVoid (composites)Seebeck coefficientThin filmElectrical resistivity and conductivitySputter depositionComposite materialThermoelectric materialsNanotechnologyThermal conductivityThermodynamicsElectrical engineeringPhysicsEngineeringPhase-change materials and chalcogenidesAdvanced Thermoelectric Materials and DevicesChalcogenide Semiconductor Thin Films