Nanobowtie arrays with tunable materials and geometries fabricated by holographic lithography
Bowen Liu, Chao Zhan, Yao Xu, Sen Yan, Bin Ren
Abstract
NBAs, respectively. This THL technique shows unique advantages in fabricating well-defined and large-area nanostructures in a high throughput way, facilitating practical applications in a broad range of fields of optoelectronics.
Topics & Concepts
LithographyHolographyMaterials scienceNanotechnologyOptoelectronicsOpticsPhysicsNanofabrication and Lithography TechniquesOptical Coatings and GratingsNear-Field Optical Microscopy