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N- and p-type doping of transition-metal dichalcogenides by Ar plasma treatment and its application in CMOS

Jiaoyan He, Yuanbo Wen, Dongshuang Han, Peiyu Zeng, Peng Zheng, Liang Zheng, Weitao Su, Zhangting Wu, Yang Zhang

2023Materials Science in Semiconductor Processing19 citationsDOI

Topics & Concepts

Materials scienceDopingTungsten diselenideTransition metalArgonTungstenNanotechnologyOxideOptoelectronicsAtomic physicsChemistryMetallurgyBiochemistryCatalysisPhysics2D Materials and ApplicationsMXene and MAX Phase MaterialsGraphene research and applications
N- and p-type doping of transition-metal dichalcogenides by Ar plasma treatment and its application in CMOS | Litcius