Virtual metrology of material removal rate using a one-dimensional convolutional neural network-based bidirectional long short-term memory network with attention
Chia-Yu Hsu, Yiwei Lu
Topics & Concepts
Computer scienceMetrologyConvolutional neural networkPolishingArtificial neural networkProcess (computing)Key (lock)Artificial intelligenceDeep learningWaferFeature (linguistics)Machine learningData miningReliability engineeringEngineeringMechanical engineeringMathematicsLinguisticsElectrical engineeringStatisticsOperating systemPhilosophyComputer securityAdvanced Surface Polishing TechniquesIndustrial Vision Systems and Defect DetectionAdvanced machining processes and optimization