The effect of morphology on the ozone-gas sensing properties of zinc oxide sputtered films
Y.N. Colmenares, Wagner Correr, Bruno Sanches de Lima, Valmor Roberto Mastelaro
Topics & Concepts
SputteringPorosityThin filmMaterials scienceOzoneDeposition (geology)ZincSemiconductorOxideNanostructureCeramicThermal oxidationOptoelectronicsNanotechnologyChemistryComposite materialSiliconMetallurgySedimentOrganic chemistryBiologyPaleontologyGas Sensing Nanomaterials and SensorsZnO doping and propertiesAnalytical Chemistry and Sensors