Phase-gradient atomic layer deposition of TiO2 thin films by plasma-induced local crystallization
Dohyun Go, Jaehyeong Lee, Jeong Woo Shin, Sungje Lee, Wangu Kang, Jeong Hwan Han, Jihwan An
Topics & Concepts
Materials scienceAtomic layer depositionCrystallizationAmorphous solidDielectricThin filmFabricationDeposition (geology)PlasmaLayer (electronics)Phase (matter)OptoelectronicsComposite materialChemical engineeringNanotechnologyCrystallographyQuantum mechanicsPaleontologyAlternative medicinePathologyBiologyMedicineEngineeringChemistryPhysicsOrganic chemistrySedimentSemiconductor materials and devicesElectronic and Structural Properties of OxidesZnO doping and properties