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Thermodynamic assessment of the different steps observed during SiC oxidation

Christian Chatillon, F. Teyssandier

2021Journal of the European Ceramic Society38 citationsDOIOpen Access PDF

Topics & Concepts

VaporizationMaterials scienceThermodynamicsPhysicsAdvanced ceramic materials synthesisSemiconductor materials and devicesSilicon Carbide Semiconductor Technologies
Thermodynamic assessment of the different steps observed during SiC oxidation | Litcius