Mechanical properties, bonding characteristics, and thermal stability of magnetron-sputtered HfN films
Yi-En Ke, Yung-I Chen
Topics & Concepts
NanoindentationMaterials scienceStoichiometryThermal stabilityAmorphous solidSputter depositionNitrogenAnalytical Chemistry (journal)Cavity magnetronMetallic bondingComposite materialSputteringThin filmChemical engineeringMetalMetallurgyCrystallographyNanotechnologyPhysical chemistryOrganic chemistryChemistryEngineeringMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchSemiconductor materials and devices