<i>c</i>-Axis Aligned 3 nm Thick In<sub>2</sub>O<sub>3</sub> Crystal Using New Liquid DBADMIn Precursor for Highly Scaled FET Beyond the Mobility–Stability Trade-off
Su‐Hwan Choi, Seong‐Hwan Ryu, Dong-Gyu Kim, Jae‐Hyeok Kwag, Changbong Yeon, Jae‐Sun Jung, Young-Soo Park, Jin‐Seong Park
Abstract
Oxide semiconductors (OS) are attractive materials for memory and logic device applications owing to their low off-current, high field effect mobility, and superior large-area uniformity. Recently, successful research has reported the high field-effect mobility (μ FE ) of crystalline OS channel transistors (above 50 cm 2 V –1 s –1 ). However, the memory and logic device application presents challenges in mobility and stability trade-offs. Here, we propose a method for achieving high-mobility and high-stability by lowering the grain boundary effect. A DBADMIn precursor was synthesized to deposit highly c -axis-aligned C(222) crystalline 3 nm thick In 2 O 3 films. In this study, the 250 °C deposited 3 nm thick In 2 O 3 channel transistor exhibited high μ FE of 41.12 cm 2 V –1 s –1, V th of −0.50 V, and SS of 150 mV decade –1 with superior stability of 0.16 V positive shift during PBTS at 100 °C, 3 MV cm –1 stress conditions for 3 h.