Phase composition and mechanical properties of homostructure NbN nanocomposite coatings deposited by modulated pulsed power magnetron sputtering
Yuge Li, Hao Yuan, Z.T. Jiang, N. Pan, M.K. Lei
Topics & Concepts
Materials scienceNanocompositeHigh-power impulse magnetron sputteringResidual stressComposite materialSputter depositionCoatingToughnessPhase (matter)SputteringMicrostructureThin filmNanotechnologyChemistryOrganic chemistryMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchBoron and Carbon Nanomaterials Research